发明名称 Semiconductor device having a capacitor and a fabrication method thereof
摘要 In a semiconductor device having a capacitor and a method of fabricating the same, the semiconductor device comprises a semiconductor substrate and an insulating layer on the semiconductor substrate, a contact plug electrically connected to the semiconductor substrate and formed in the contact hole, a buffer conductive layer pattern electrically connected to the contact plug and formed on the insulating layer and the contact plug, an etching stopping layer formed on the buffer conductive layer pattern, a gap between the buffer conductive layer pattern and the etching stopping layer, a capacitor lower electrode electrically connected to the buffer conductive layer pattern and formed on the buffer conductive layer pattern. The gap is filled by a portion of the capacitor lower electrode.
申请公布号 US7393742(B2) 申请公布日期 2008.07.01
申请号 US20060357832 申请日期 2006.02.17
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK WON-MO
分类号 H01L21/8242 主分类号 H01L21/8242
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