METHOD FOR MANUFACTURING LAMINATED CERAMIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To significantly reduce the time required for a degreasing step after achieving prevention of oxidation of a base-metal inner-electrode layer, sufficient dissipation of a binder, prevention of elution of the inner-electrode layer and the like. SOLUTION: In the method for manufacturing the laminated ceramic element, a laminate is formed by alternately stacking ceramic precursor layers including materials of ceramic layers and inner-electrode precursor layers including base metals as materials of the inner-electrode layers and is fired. The method has the degreasing step for resolving and removing the binder included in the laminate before firing. The degreasing step includes a first degreasing process for performing heat treatment by introducing a first atmosphere gas which includes an inert gas and an oxygen gas and exhibits a partial pressure of the oxygen gas of 5×10-4Pa to 2×104Pa in a temperature range between at least 300°C to 400°C and a second degreasing process for introducing a second atmosphere gas which includes an inert gas and vapor and performing heat treatment at a temperature higher than the first degreasing process under an atmosphere including oxygen which is produced by dissociation of vapor. COPYRIGHT: (C)2008,JPO&INPIT