DEVICE FOR GENERATING HAZE ON A PHOTOMASK

摘要

Provided is a device for generating haze on a photomask having an improved structure capable of irradiating a laser beam of predetermined energy intensity onto a photomask until haze is generated, accurately obtaining the amount of laser beam energy accumulated on the photomask, and controlling an environment in a process chamber. The haze generating device includes: a laser emission unit for emitting a laser beam; an attenuator for controlling energy intensity of the laser beam; an optical system for processing the laser beam so that the laser beam has a predetermined shape and energy distribution; a process chamber having a window installed at an upper portion thereof and formed of a transparent material, through which the laser beam passes, and a space formed therein to dispose the photomask and fill a process gas, the space being separated from the outside; and an attenuator control unit for controlling the attenuator so that the laser beam of predetermined reference energy intensity is irradiated onto the photomask based on incident energy intensity of a laser beam incident to the window.