| 摘要 |
PROBLEM TO BE SOLVED: To provide a small and inexpensive squeeze air bearing requiring no complicated adjustment, having a large lifting amount of a sliding part, and carrying out stable support without contact by a squeeze air film, and also to provide a positioning guide device using it. SOLUTION: The squeeze air bearing is provided with: a flat plate like attachment part 7 for attaching a movable body; the slanted sliding part 2 vibrated in a vibrating direction with respect to the attachment part 7 by a vibrator 1 composed of a piezoelectric device; and a substantially V-shaped guide face 3 facing a vibration face 2a of the sliding part 2 via a very small gap 4. It supports the sliding part 2 without contact by the squeeze air film. The vibrator 1 is composed singularly, two vibration faces 2a of the sliding part 2 are provided, and the vibration faces 2a of the sliding part 2 are respectively provided in symmetrical positions with respect to an axial direction in which the vibrator 1 is arranged. COPYRIGHT: (C)2008,JPO&INPIT
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