ACCELERATION SENSOR WITH COMB-SHAPED ELECTRODES

摘要

The invention relates to a micromechanical capacitive acceleration sensor having at least one seismic mass (1) connected in a deflectable manner to a substrate (5), at least one electrode (11) rigidly connected to the substrate (5), and at least one electrode (6) connected to the seismic mass (1), wherein the at least one electrode (11) rigidly connected to the substrate (5) and the at least one electrode (6) connected to the seismic mass (1) are embodied as comb-shaped electrodes (6, 11) with lamellae (8, 13) extending parallel to the deflection direction of the seismic mass (1), wherein the lamellae (8, 13) of both comb-shaped electrodes (6, 11) partially overlap in the resting state.