| 摘要 |
A decompression drying apparatus is provided to reduce the production preparation time and to cope with various models of the LCD panels actively. An upper chamber member is located at the upper portion of a housing and performs a pressure-reduction discharge process. A lower chamber portion is located at the lower portion of the upper chamber portion and performs the pressure-reduction discharge process. A substrate with the coated photosensitive film is moved inward and outward at the lower chamber portion. Plural support pins support the substrate at the pressure-reduction discharge process. A moving member moves the plural support pins. The plural support pins are arrayed at the boundary areas(122) of plural LCD panels(121) included to the substrate. An upper plate is located at the upper chamber portion. A discharge path is formed between the housing and the upper plate. Plural support pins are installed to a lower plate. |
