| 摘要 |
A substrate processing apparatus is provided to fasten an extension pulley, coupled with a detachable sub roller, to an end of a driving pulley to be rotated with the same number of rotations as a substrate conveying shaft, thereby enabling a worker to measure substrate conveying speed easily at the outside of a processing chamber. Within a processing chamber(110), processing for a substrate(102) is performed. Substrate conveying shafts(120~190) convey the substrate and include a first roller(124). A driving unit(200) comprises a motor(208), first and second pulleys(204,210) and a second roller(212). The motor generates driving force required to rotate the substrate conveying shaft. The first pulley transmits the driving force of the motor to the substrate conveying shaft. The second pulley rotates together with the first pulley by being associated with the first pulley. The second roller rotates together with the second pulley by being associated with the second pulley. A driving belt(206) connects the motor with the first pulley to transmit the driving force of the motor to the first pulley. |
