| 摘要 |
<p>A shape measuring apparatus, a shape measuring method, and an exposure apparatus are provided to process data and display a measured result and a measured condition, using a processor and a display device so as to measure a surface shape of the object accurately. A shape measuring apparatus comprises a light transmitting optical system, a stage system, a light receiving optical system, and a data processing system. The light transmitting optical system includes a light source(1), a condenser lens(2), a pin hole(3), a lens(4), and a beam splitter(5a). The stage system has a substrate chuck and a driving device. The driving device includes a Z stage(8), a Y stage(9), and an X stage(10). The light receiving system includes a beam splitter(5b), a photoelectric conversion unit(14), an immersion optical system with lens(11,13), and an opening stop(12). The data processing system includes a processor(50), a memory(51), and a displaying device(52) for displaying the measured result and the measured condition.</p> |
