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发明名称
摘要
申请公布号	JP2008522416(A)	申请公布日期	2008.06.26
申请号	JP20070543539	申请日期	2005.11.22
申请人		发明人
分类号	H01L21/31;C23C16/455	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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