| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet light generating device capable of generating ultraviolet light efficiently with high safety, using an excimer lamp. SOLUTION: A container 1 made of dielectric substance allowing permeation ofultraviolet is filled with a discharge gas 4 consisting primarily of mixed gases of one or more rare gases of helium, argon, krypton and xenon forming an excimer molecule, and one or more halogens of fluorine, iodine, chlorine and bromine. An alternate voltage or a pulse voltage is applied from a power source 3 to between a pair of electrodes 2 separately disposed from each other around the container, to thereby generate the discharge in the container 1 made of dielectric substance to generate ultraviolet light. COPYRIGHT: (C)2008,JPO&INPIT
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