发明名称 SEMICONDUCTOR TESTING DEVICE, TESTING SYSTEM, AND MANUFACTURING APPARATUS
摘要 PROBLEM TO BE SOLVED: To solve a problem wherein a data format used in a semiconductor testing device is not controlled seamlessly with versatile network equipment controlled using an SNMP, even when connected to the same network, because the data format is a peculiar format. SOLUTION: A data of a testing body part is converted into a data of a format along an MIB to be stored in an MIB database, using an MIB conversion part for conducting mutual conversion between the data of the testing body part for testing the quality of a semiconductor and the data of the format along the MIB, the semiconductor testing device is controlled using the SNMP. A semiconductor testing system and a semiconductor manufacturing apparatus are constituted using the semiconductor testing device. Seamless control is allowed with the other network equipment. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008145105(A) 申请公布日期 2008.06.26
申请号 JP20060328885 申请日期 2006.12.06
申请人 YOKOGAWA ELECTRIC CORP 发明人 NEGISHI KINICHI
分类号 G01R31/28;H01L21/66 主分类号 G01R31/28
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