| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum apparatus providing a desired exhaust speed without using a pump of a high exhaust speed, reducing inside diameters of pipes, and suppressing power consumption of heating means heating the pipes. SOLUTION: With first vacuum pumps 1, 2 and 3 and second vacuum pumps 4, 5 and 6 driven, a gas flow in the first pipe A2 between vacuum containers 10, 11 and 12 and the first vacuum pumps 1, 2 and 3 becomes a molecular flow or a median flow between the molecular flow and a viscous flow, and a gas flow in the second pipe A1 between the first vacuum pumps 1, 2 and 3 and the second vacuum pumps 4, 5 and 6 becomes the viscous flow. COPYRIGHT: (C)2008,JPO&INPIT
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