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发明名称
WAFER ALIGNING METHOD
摘要
A wafer aligning method for wafer inspection devices, etc., a pre-alignment and a fine alignment are performed by using the same camera, so that pre-alignment and fine alignment can be performed by using the same device.
申请公布号
WO9743785(A1)
申请公布日期
1997.11.20
申请号
WO1997JP01590
申请日期
1997.05.12
申请人
KOMATSU LTD.;MATSUNO, KIYONORI;OKAMOTO, TAKESHI;TADA, SHIGEYUKI;TANUKI, TOMIKAZU;TANAKA, MASAYA
发明人
MATSUNO, KIYONORI;OKAMOTO, TAKESHI;TADA, SHIGEYUKI;TANUKI, TOMIKAZU;TANAKA, MASAYA
分类号
G01N21/88;G01N21/956;G03F7/20;G06T1/00;G06T7/60;H01L21/027;H01L21/66;H01L21/68;(IPC1-7):H01L21/68
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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