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发明名称
METHOD FOR ACCELERATING ETCHING OF SILICON
摘要
申请公布号
EP1935009(A1)
申请公布日期
2008.06.25
申请号
EP20060806773
申请日期
2006.09.18
申请人
ROBERT BOSCH GMBH
发明人
BENZEL, HUBERT;PINTER, STEFAN;SCHELLING, CHRISTOPH;PIRK, TJALF;GONSKA, JULIAN;KLOPF, FRANK;LEINENBACH, CHRISTINA
分类号
H01L21/306;H01L21/3213
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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