发明名称 METHOD AND DEVICE FOR SAWING A WORKPIECE
摘要 A method and a device for sawing a workpiece are provided to prevent occurrence of sawing grooves by filling kerfs with sawing suspension. In a method for sawing a workpiece, the workpiece is fed through a wire web formed by a sawing wire. Kerfs of the workpiece are filled with sawing suspension during a sawing process. The workpiece is immersed into a reservoir which is filled with the sawing suspension. The sawing suspension contains an abrasive and a carrier liquid. The sawing suspension flows from the reservoir in a direction parallel to a wire running direction. The reservoir is disposed and filled so that at least a part of the sawing wire with which is engaged during the sawing process is immersed into the sawing suspension of the reservoir, with the result that the kerfs of the workpiece become filled with the sawing suspension.
申请公布号 KR20080058170(A) 申请公布日期 2008.06.25
申请号 KR20070117895 申请日期 2007.11.19
申请人 SILTRONIC AG 发明人 SKOVGAARD SOERENSEN FRANK
分类号 H01L21/301;H01L21/02;H01L21/78 主分类号 H01L21/301
代理机构 代理人
主权项
地址