Flow control valve and flow control device

摘要

There are provided a flow control valve and a flow control device suitable for allowing flow control of a fluid with high accuracy. Diaphragms 8 and 9 are mounted to upper and lower openings, respectively, of an air chamber 6. The upper diaphragm 8 and the lower diaphragm 9 are connected by a connecting shaft 10 and have pressurized surfaces with different areas that receive pressure of the air chamber 6. This causes a difference between forces applied to the two diaphragms 8 and 9, and the difference causes the connecting shaft 10 and a valve body 2 mounted to an outer surface of the lower diaphragm 9 to slide and be separated from a valve seat 23.