| 摘要 |
A wafer deflection testing apparatus and a wafer deflection testing method using the same are provided to receive light reflected from an upper surface of a wafer and to display the deflected level of the upper surface of the wafer so as to check a finely deflected degree of the wafer with the naked eye, thereby detecting an abnormal state of the wafer. A wafer deflection testing apparatus comprises a light scanning part(100), and a light receiving part. The light scanning part, which is placed at a side of an upper part of a wafer(W), scans light to be inclined to an upper surface of the wafer. The light receiving part, placed at the other side of the upper part of the wafer, receives the light reflected from the upper surface of the wafer and displays how the upper surface of the wafer is deflected. The light scanning part includes a body, lamps(110), and a power source. The lamps are arranged in the body.
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