发明名称 |
System for supplying a thermal agent to a testing machine for testing objects under thermally hard circumstances |
摘要 |
A system for supplying a thermal agent to a testing machine used to test objects such as electronic devices and mechanical components to see how they can withstand thermally hard circumstances created by the thermal agent supplied from a supplying section communicating with the testing machine, wherein heat exchange is effected between the incoming agent and the outgoing agent, so that the remaining heat content, worm or cold, is taken and utilized for later uses.
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申请公布号 |
EP1936662(A2) |
申请公布日期 |
2008.06.25 |
申请号 |
EP20070024751 |
申请日期 |
2007.12.20 |
申请人 |
ESPEC CORP. |
发明人 |
NAKANISHI, MASATAKA;KURARA, HIRONOBU;NISHIKAWA, TEIHEI |
分类号 |
H01L21/00;G01R31/26;H01L21/66 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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