发明名称 |
A Pellicle, a Process for Preparing the Same, and an Adhesive Used therefor |
摘要 |
<p>A pellicle comprises a pellicle film and a pellicle frame for supporting the pellicle film, wherein the pellicle film is adhered to the pellicle frame through an adhesive layer comprising a fluorine-containing polymer and a substance resulting from curing of an ultraviolet-curing fluorine-containing monomer. A producing method of a pellicle including a pellicle film and a pellicle frame for supporting the pellicle film, comprises a step of adhering the pellicle film to the pellicle frame through an adhesive comprising a fluorine-containing polymer and an ultraviolet-curing fluorine-containing monomer.</p> |
申请公布号 |
KR100841515(B1) |
申请公布日期 |
2008.06.25 |
申请号 |
KR20010084947 |
申请日期 |
2001.12.26 |
申请人 |
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发明人 |
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分类号 |
C09J4/00;C09J4/06;G03F1/64 |
主分类号 |
C09J4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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