发明名称 |
Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
摘要 |
Methods for rotating a magnetic field in a process chamber is provided herein. In one embodiment, a method for rotating a magnetic field in a process chamber includes forming a magnetic field having a primary shape; changing the primary shape to at least two sequential transitional shapes; and changing the transitional shape to a rotated primary shape. Optionally, the magnetic field may be maintained at an approximately constant magnitude throughout each step. Optionally, a maximum of one current applied to one or more magnetic field producing coils is equal to zero or has its polarity reversed between any two adjacent steps.
|
申请公布号 |
EP1936658(A2) |
申请公布日期 |
2008.06.25 |
申请号 |
EP20070122847 |
申请日期 |
2007.12.11 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LINDLEY, ROGER ALAN;HOGENSON, SCOTT A.;HOFFMAN, DANIEL J. |
分类号 |
H01J37/32;H01L21/306 |
主分类号 |
H01J37/32 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|