Differential Shack-Hartmann curvature sensor

摘要

A differential Shack-Hartmann curvature sensor for measuring a curvature including principal curvatures and directions of a wavefront. The curvature sensor includes a Shack-Hartmann sensor with an input beam and an optical element to split said input beam into three output beams traveling in different directions. Three lenslet arrays in each of the three beam paths produce corresponding Hartmann grids. A shearing device shears two of the three Hartmann grids in two perpendicular directions a differential difference. A measuring device measures the Hartmann grid coordinates generated by said three beams to determine various curvatures of the wavefront at each of the Hartmann grid points.