发明名称 MOS transistor and manufacturing method thereof
摘要 A MOS transistor including a gate insulation layer and a gate electrode layer on a channel region of a semiconductor substrate. A gate spacer layer is formed on a sidewall of the electrode layer and the insulation layer. The transistor includes a deep extended source/drain region, a first source/drain region that is deeper than the extended source/drain region, and a second source/drain region that is shallower than the extended source/drain region.
申请公布号 US7390711(B2) 申请公布日期 2008.06.24
申请号 US20050300292 申请日期 2005.12.15
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 BYUN DONG-IL
分类号 H01L21/8238 主分类号 H01L21/8238
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