APPARATUS FOR LOADING AND UNLOADING OF AUTOMATED DEVICE
摘要
An apparatus for attaching and detaching an automated device is provided to additionally install a damper device at a side surface of a support frame in order to prevent contact between a third linear movement part and a fine movement part. An apparatus for attaching and detaching an automated device includes a controller(101), and a movable frame(104). The controller is mounted on the movable frame. The movable frame includes a horizontal structure(105) and a vertical structure(106). The horizontal structure includes a plurality of wheels(102) and a stopper(103). The vertical structure is installed at one end of the horizontal structure in a direction perpendicular to the horizontal structure. A third linear movement part(130) is configured to perform reciprocation in a Z axis.