| 发明名称 |
PUMP APPARATUS FOR SEMICONDUCTOR PROCESSING |
| 摘要 |
<p>The invention relates to a pump apparatus for use in semiconductor processing. The apparatus may include a single pump configured to transition a substance flow from about molecular pressure to about atmospheric pressure.</p> |
| 申请公布号 |
KR20080056192(A) |
申请公布日期 |
2008.06.20 |
| 申请号 |
KR20087008282 |
申请日期 |
2008.04.04 |
| 申请人 |
EDWARDS VACUUM, INC. |
发明人 |
HUNTLEY GRAEME |
| 分类号 |
F01C19/00;F04D29/04;H01L21/02 |
主分类号 |
F01C19/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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