发明名称 TREATMENT DEVICE, TREATMENT METHOD, AND SURFACE TREATMENT JIG
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a treatment device, treatment method, and surface treatment jig, capable of applying different treatments to one treated surface and the other exposed surface which is arranged on the outer periphery thereof. <P>SOLUTION: A treatment device 100 treats a body 18 to be treated comprising treated surfaces, that includes second treated surface 18b and a first treated surface 18a, arranged on the outer periphery of the second treated surface 18b and comprises a treatment jig 20, including a placement part 10 on which the treated body 18 is placed; a first supply part 24 which supplies a first treatment liquid around the border between the first treated surface 18a and the second treated surface 18b; and a second supply part 46 which supplies a second treatment liquid to the second treated surface 18b. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008140908(A) 申请公布日期 2008.06.19
申请号 JP20060324433 申请日期 2006.11.30
申请人 TOKYO OHKA KOGYO CO LTD 发明人 IWATA YASUMASA;NAKAMURA AKIHIKO
分类号 H01L21/304 主分类号 H01L21/304
代理机构 代理人
主权项
地址