发明名称 Semiconductor device and process for fabricating the same
摘要 A semiconductor device comprising at least two thin film transistors on a substrate having an insulating surface thereon, provided that the thin film transistors are isolated by oxidizing the outer periphery of the active layer of each of the thin film transistors to the bottom to provide an oxide insulating film.
申请公布号 US2008145983(A1) 申请公布日期 2008.06.19
申请号 US20080068466 申请日期 2008.02.07
申请人 发明人 TAKEMURA YASUHIKO;ADACHI HIROKI
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
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