| 摘要 |
PROBLEM TO BE SOLVED: To provide a real time analyzer for performing measurement of high quantitative precision by separating obstructive impurities while performing real time measurement. SOLUTION: The introducing piping of a sample gas is branched and the sample gas is directly introduced into an ion source by one branched introducing piping to be preliminarily analyzed in a real time while introduced into the ion source by the other branched introducing piping so as to be delayed. The spectrum pattern on an MS spectrum is changed by a real time analyzing result: when a rise in the concentration of an impurity component is observed the sample introducing route is changed over and the impurity component is separated by separation part provided on one introducing piping to introduce the sample gas into the ion source. COPYRIGHT: (C)2008,JPO&INPIT
|
