BOTTOM ANTI-REFLECTIVE COAT FORMING COMPOSITION FOR LITHOGRAPHY,申请号KR20020009326-传众专利搜索

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发明名称	BOTTOM ANTI-REFLECTIVE COAT FORMING COMPOSITION FOR LITHOGRAPHY
摘要
申请公布号	KR100838000(B1)	申请公布日期	2008.06.13
申请号	KR20020009326	申请日期	2002.02.21
申请人		发明人
分类号	G03F7/004;G03F7/038;G03F7/09	主分类号	G03F7/004
代理机构		代理人
主权项
地址

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