| 摘要 |
An abrasive pad and an apparatus using the pad are provided to extend lifespan of the abrasive pad, to improve flatness of the processed surface, and to prevent a workpiece to be abraded from adhering to the pad. An abrasive pad(20) has a plate shaped body(21) having a surface(22) with abrasive material and the other surface with backing material, and plural intersecting slots(31) having arms extended in different directions and penetrated from the abrasive material surface to backing material surface.
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