发明名称 DEVICE AND METHOD FOR SEPARATING MATERIALS
摘要 PROBLEM TO BE SOLVED: To provide a device capable of separating single crystals by cutting inner hole with a small amount of coolant-lubricant. SOLUTION: A cutting disk 2 having a concentric hole for inner hole cutting is rotatable about its central axis in order to cut a single crystal 1 with its edge 3. The device includes a positioning device for positioning the single crystal 1 to be cut relative to the cutting disk 2, a first supply device 10 for the supply of the coolant-lubricant onto the cutting disk 2 having cut the single crystal 1, a device 12 for the supply of compressed air, and a second supply device 11 for the supply of washing liquid. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008135712(A) 申请公布日期 2008.06.12
申请号 JP20070260189 申请日期 2007.10.03
申请人 FREIBERGER COMPOUND MATERIALS GMBH 发明人 HAMMER RALF;GRUSZYNSKY RALF;KLEINWECHTER ANDRE;FLADE TILO
分类号 B28D5/02;H01L21/304;B28D5/00;B28D7/02;C30B33/00 主分类号 B28D5/02
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