发明名称 |
DEVICE AND METHOD FOR SEPARATING MATERIALS |
摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of separating single crystals by cutting inner hole with a small amount of coolant-lubricant. SOLUTION: A cutting disk 2 having a concentric hole for inner hole cutting is rotatable about its central axis in order to cut a single crystal 1 with its edge 3. The device includes a positioning device for positioning the single crystal 1 to be cut relative to the cutting disk 2, a first supply device 10 for the supply of the coolant-lubricant onto the cutting disk 2 having cut the single crystal 1, a device 12 for the supply of compressed air, and a second supply device 11 for the supply of washing liquid. COPYRIGHT: (C)2008,JPO&INPIT
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申请公布号 |
JP2008135712(A) |
申请公布日期 |
2008.06.12 |
申请号 |
JP20070260189 |
申请日期 |
2007.10.03 |
申请人 |
FREIBERGER COMPOUND MATERIALS GMBH |
发明人 |
HAMMER RALF;GRUSZYNSKY RALF;KLEINWECHTER ANDRE;FLADE TILO |
分类号 |
B28D5/02;H01L21/304;B28D5/00;B28D7/02;C30B33/00 |
主分类号 |
B28D5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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