| 摘要 |
PROBLEM TO BE SOLVED: To provide a transmission electron microscope capable of manufacturing and observing samples. SOLUTION: The ion-beam irradiation port of an ion gun 11 is formed inside a sample chamber 5 so as to be disposed opposite to the surface of the sample. Consequently, the ion beam can be directly irradiated from the ion-beam irradiation port onto the surface of the sample set to a sample holder 4, resulting in manufacturing a large-area thin film. As the ion gun 11 irradiates the ion beam of a rare gas onto the surface of the sample, dry etching can be performed stably irrespective of the sample material. COPYRIGHT: (C)2008,JPO&INPIT
|
