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发明名称
摘要
申请公布号	JP2008519905(A)	申请公布日期	2008.06.12
申请号	JP20070540349	申请日期	2005.10.26
申请人		发明人
分类号	C23C14/24;C23C14/12;H01L51/50;H05B33/10	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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