发明名称 PATTERN FORMATION METHOD AND CIRCUIT SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a pattern formation method for forming a high-density/high-definition pattern in a short period, and to provide a circuit substrate. SOLUTION: A green sheet 4G is heated by a rubber heater H provided on a stage 24. The green sheet 4G is subjected to heating control so as to make it reach a temperature higher than or equal to the temperature of a functional liquid during discharge and lower than or equal to the liquid-droplet boiling point. Under this heated condition, liquid-droplets are discharged onto the green sheet 4G from a liquid-droplet discharge head 30. The liquid-droplets that land on the green sheet 4G are dried quickly, without bumping. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008135599(A) 申请公布日期 2008.06.12
申请号 JP20060321257 申请日期 2006.11.29
申请人 SEIKO EPSON CORP 发明人 TOYODA NAOYUKI
分类号 H01L23/12;H05K3/10 主分类号 H01L23/12
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