摘要 |
This invention relates to organoaluminum precursor compounds represented by the formula: wherein R<SUB>1</SUB>, R<SUB>2</SUB>, R<SUB>3 </SUB>and R<SUB>4 </SUB>are the same or different and each represents hydrogen or an alkyl group having from 1 to about 3 carbon atoms, and R<SUB>5 </SUB>represents an alkyl group having from 1 to about 3 carbon atoms. This invention also relates to processes for producing the organoaluminum precursor compounds and a method for producing a film or coating from the organoaluminum precursor compounds.
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