发明名称 Semiconductor device, method of manufacturing the same, and method of designing the same
摘要 An object of the present invention is to provide a semiconductor device formed by laser crystallization by which formation of grain boundaries in the TFT channel formation region can be avoided, and a method of manufacturing the same. Still another object of the present invention is to provide a method of designating the semiconductor device. The present invention relates to a semiconductor device with a plurality of cells each having a plurality of TFTs that have the same channel length direction, in which the plural cells form a plurality of columns along the channel length direction, in which an island-like semiconductor film of each of the plural TFTs is crystallized by laser light running in the channel length direction, in which a channel formation region of the island-like semiconductor film is placed on a depressive portion of a base film that has a rectangular or stripe pattern concave and convex with the channel length direction matching the longitudinal direction of the depressive portion, and in which a plurality of wires for electrically connecting the plural cells with one another are formed between the plural columns.
申请公布号 US2008138943(A1) 申请公布日期 2008.06.12
申请号 US20080003983 申请日期 2008.01.04
申请人 发明人 KATO KIYOSHI;SAITO TOSHIHIKO;ISOBE ATSUO;TAKAYAMA TORU;MARUYAMA JUNYA;GOTO YUUGO;OHNO YUMIKO
分类号 H01L21/84 主分类号 H01L21/84
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