发明名称 Drop generator
摘要 A method for making an electromechanical device including forming an electromechanical transducer that includes a deposited metallic diaphragm, and attaching the electromechanical transducer to a fluid channel substructure.
申请公布号 US2008138925(A1) 申请公布日期 2008.06.12
申请号 US20060635409 申请日期 2006.12.07
申请人 XEROX CORPORATION 发明人 ANDREWS JOHN R.;STEPHENS TERRANCE L.
分类号 H01L21/00 主分类号 H01L21/00
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