发明名称 |
VERFAHREN ZUR GEHÄUSEBILDUNG BEI ELEKTRONISCHEN BAUTEILEN SO WIE SO HERMETISCH VERKAPSELTE ELEKTRONISCHE BAUTEILE |
摘要 |
A process to encapsulate electronic modules in a manner which is substantially resistant to water diffusion yet is carried out at moderate temperatures below 300° C., preferably below 150° C. is provided. The process forms a housing for electronic modules, in particular sensors, integrated circuits and optoelectronic components. The process includes the steps of: providing a substrate, of which at least a first substrate side is to be encapsulated; providing a vapor-deposition glass source; arranging the first substrate side in such a manner with respect to the vapor-deposition glass source that the first substrate side can be vapor-coated; and vapor-coating the first substrate side with a glass layer. |
申请公布号 |
DE50309735(D1) |
申请公布日期 |
2008.06.12 |
申请号 |
DE2003509735 |
申请日期 |
2003.04.15 |
申请人 |
SCHOTT AG |
发明人 |
LEIB, JUERGEN;MUND, DIETRICH |
分类号 |
C23C14/10;G02B3/00;B81C1/00;B81C3/00;C03B19/00;C03C4/12;C03C14/00;C03C15/00;C03C17/02;C03C17/34;C03C27/02;H01L21/027;H01L21/306;H01L21/3065;H01L21/312;H01L21/316;H01L21/50;H01L21/56;H01L21/768;H01L23/00;H01L23/02;H01L23/10;H01L23/29;H01L23/31;H01L23/48;H01L23/498;H01L51/50;H01L51/52;H05B33/04;H05B33/10;H05B33/24;H05B33/26;H05B33/28;H05K3/28 |
主分类号 |
C23C14/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|