发明名称 |
Lens Module Comprising at Least One Exchangeable Optical Element |
摘要 |
Disclosed is a lens module, especially a projection lens for semiconductor lithography, comprising at least one replaceable optical element that is disposed in a lens housing. At least one gas exchange device is positioned in an area of the replaceable optical element in such a way that a receiving zone for the replaceable optical element can be flushed when the optical element is replaced.
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申请公布号 |
US2008137192(A1) |
申请公布日期 |
2008.06.12 |
申请号 |
US20050722595 |
申请日期 |
2005.12.23 |
申请人 |
SOYEZ GUIDO;BACK STEPHAN;BUECHELE JOACHIM;KALLER JULIAN;LIMBACH GUIDO;WOELFLE HARALD |
发明人 |
SOYEZ GUIDO;BACK STEPHAN;BUECHELE JOACHIM;KALLER JULIAN;LIMBACH GUIDO;WOELFLE HARALD |
分类号 |
G02B7/14 |
主分类号 |
G02B7/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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