发明名称 CONVERSION BOX OF SEMICONDUCTOR TESTER
摘要 PROBLEM TO BE SOLVED: To provide a conversion box of a semiconductor tester, which has a drop prevention function. SOLUTION: This conversion box loaded and fixed on a test head is characterized by being equipped with: a fitting block provided with one surface in contact with one surface of the conversion box; a lock hole provided in the fitting block, into which a lock pin of the test head is inserted at the locking time; and a detection sensor provided on the fitting block, for detecting whether the lock pin is inserted into the lock hole at the locking time. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008134171(A) 申请公布日期 2008.06.12
申请号 JP20060321221 申请日期 2006.11.29
申请人 YOKOGAWA ELECTRIC CORP 发明人 TAKAYANAGI TAKAYASU
分类号 G01R31/28;H01L21/66 主分类号 G01R31/28
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