| 发明名称 |
SEMICONDUCTOR STRUCTURES WITH STRUCTURAL HOMOGENEITY |
| 摘要 |
Semiconductor structures are formed with semiconductor layers having reduced compositional variation. Top surfaces of the semiconductor layers are substantially haze-free.
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| 申请公布号 |
US2008135830(A1) |
申请公布日期 |
2008.06.12 |
| 申请号 |
US20070963120 |
申请日期 |
2007.12.21 |
| 申请人 |
AMBERWAVE SYSTEMS CORPORATION |
发明人 |
WESTHOFF RICHARD;VINEIS CHRISTOPHER J.;CURRIE MATTHEW T.;YANG VICKY K.;LEITZ CHRISTOPHER W. |
| 分类号 |
H01L29/15;C30B25/02;C30B29/52;H01L21/20;H01L21/205;H01L21/30;H01L21/324 |
主分类号 |
H01L29/15 |
| 代理机构 |
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