发明名称 Silica glass crucible with bubble-free and reduced bubble growth wall
摘要 A silica glass crucible includes a stable, bubble-free inner layer and an opaque outer layer, both layers demonstrating reduced bubble growth during a Czochralski process. When used in the CZ process, little volume change is observed in the crucible wall, and the crucible has little influence on melt level. The present crucible is especially suited for slow silicon ingot pulling with reduced crystalline defects. The fusion process of the present invention controls the dynamic gas balance at the fusion front where formed grain is melted to dense fused silica.
申请公布号 US7383696(B2) 申请公布日期 2008.06.10
申请号 US20050223158 申请日期 2005.09.08
申请人 HERAEUS SHIN-ETSU AMERICA, INC. 发明人 KEMMOCHI KATSUHIKO;MOSIER ROBERT;OHAMA YASUO
分类号 C30B35/00 主分类号 C30B35/00
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