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发明名称
PROJECTION OPTICAL APPARATUS
摘要
申请公布号
JPH04225213(A)
申请公布日期
1992.08.14
申请号
JP19900414038
申请日期
1990.12.26
申请人
NIKON CORP
发明人
KAMIYA SABURO;TANIGUCHI TETSUO
分类号
H01L21/30;G03F7/20;H01L21/027
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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