发明名称 |
Parallel control method for sequential process control flow |
摘要 |
A parallel control method for sequential process control flow. First, a parallel step including a plurality of independent sub-steps is generated in a sequential process control flow. One of the sub-steps is directed to execute at a time, and any sub-step gains the right to execute when the other sub-steps are in waiting state. It is assessed the parallel step is complete by whether all of the sub-steps are complete, and the sequential process control flow is controlled to a next step succeeding the parallel step if the parallel step is complete.
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申请公布号 |
US7386353(B2) |
申请公布日期 |
2008.06.10 |
申请号 |
US20040831889 |
申请日期 |
2004.04.26 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
CHEN YI-DA;CHANG YAO-HSIUNG;HO DAN |
分类号 |
G05B11/01;G06F9/46 |
主分类号 |
G05B11/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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