发明名称 Photoelectric conversion device having an insulation film on a reflection prevention film, and camera using such photoelectric conversion device
摘要 A photoelectric conversion device is provided, in which pixels are arranged in an array. Each of the pixels includes a light receiving region, transistors, and an insulation film. The insulation film is arranged on a surface of the light receiving region and under gate electrodes of the transistors. A reflection prevention film is arranged at least above the light receiving region, with the insulation film being arranged between the reflection prevention film and the light receiving region, and has a silicon nitride film. An interlayer insulation film is arranged on the reflection prevention film, and a second reflection prevention film is laminated between the reflection prevention film and the interlayer insulation film.
申请公布号 US7385172(B2) 申请公布日期 2008.06.10
申请号 US20060527485 申请日期 2006.09.27
申请人 CANON KABUSHIKI KAISHA 发明人 INOUE SHUNSUKE;YUZURIHARA HIROSHI;ITANO TETSUYA
分类号 H01L27/146;H01L31/062;H01J40/14;H01L27/14;H01L31/00;H04N5/335;H04N5/357;H04N5/369;H04N5/374;H04N101/00 主分类号 H01L27/146
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