发明名称 Liquid droplet ejecting apparatus, liquid droplet ejecting system, electro-optical device, method of manufacturing electro-optical device, method of forming a metal wiring line, and electronic apparatus
摘要 A liquid droplet ejecting apparatus including a main body, a work carrying table for supporting a work, an Y-directional movement mechanism for moving the work carrying table in the horizontal direction relative to the main body, a droplet ejecting head for ejecting liquid droplets to the work supported by the work carrying table, and at least one blowing unit for blowing a gas towards the work supported by the work carrying table to dry the liquid droplets ejected to the work, wherein the gas has a condition almost equal to the atmosphere in which the liquid droplet ejecting apparatus is placed.
申请公布号 US7384140(B2) 申请公布日期 2008.06.10
申请号 US20030739906 申请日期 2003.12.18
申请人 SEIKO EPSON CORPORATION 发明人 KOJIMA KENJI;YODA TATSUO
分类号 B41J2/01;G02B5/20;B05C5/00;B05C9/12;G02F1/13;H01L21/288;H01L51/50;H05B33/10 主分类号 B41J2/01
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