发明名称 |
Liquid droplet ejecting apparatus, liquid droplet ejecting system, electro-optical device, method of manufacturing electro-optical device, method of forming a metal wiring line, and electronic apparatus |
摘要 |
A liquid droplet ejecting apparatus including a main body, a work carrying table for supporting a work, an Y-directional movement mechanism for moving the work carrying table in the horizontal direction relative to the main body, a droplet ejecting head for ejecting liquid droplets to the work supported by the work carrying table, and at least one blowing unit for blowing a gas towards the work supported by the work carrying table to dry the liquid droplets ejected to the work, wherein the gas has a condition almost equal to the atmosphere in which the liquid droplet ejecting apparatus is placed.
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申请公布号 |
US7384140(B2) |
申请公布日期 |
2008.06.10 |
申请号 |
US20030739906 |
申请日期 |
2003.12.18 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
KOJIMA KENJI;YODA TATSUO |
分类号 |
B41J2/01;G02B5/20;B05C5/00;B05C9/12;G02F1/13;H01L21/288;H01L51/50;H05B33/10 |
主分类号 |
B41J2/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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