Field emitter array for e.g. X-ray tube, has emitters emitting electrons when emission voltage is applied on grid and substrate layers, where grid layer has resistive layer with electrical resistance to locate effects of arc formation

摘要

The array (60) has a grid layer (64) through which openings (76) are formed. A dielectric layer is placed between a substrate layer and the grid layer, and contains cavities. Spindt type field emitters (62) are arranged in the cavities of the dielectric layer and formed to emit electrons when an emission voltage is applied on the grid layer and the substrate layer. The grid layer has a resistive layer (68) with an electrical resistance in order to locate effects of arc formation.