Fixed immersion lens i.e. projection object lens, for e.g. optical system, has transparent plate supporting diffractive structures on plate surface, where structures are designed as blaced area-coded effective medium structures

摘要

The lens (20) has a coplanar and optical transparent plate supporting diffractive structures (26) on a plate surface (22), where the diffractive structures are designed as blaced area-coded effective medium structures. Another plate surface (24) is arranged in direct proximity to an image plane (14) of optical systems. An object surface is provided in the optical systems. The diffractive structures exhibit a width perpendicular to an extending direction, where the width is larger than an effective wavelength of an electromagnetic radiation.