PROCESS FOR PRODUCING TRICHLOROSILANE AND APPARATUS FOR PRODUCING TRICHLOROSILANE

摘要

This invention provides a process and apparatus for producing trichlorosilane. The process comprises reacting tetrachlorosilane with hydrogen at 900°C to 1900°C to produce a reaction produced gas containing trichlorosilane and hydrogen chloride, cooling the reaction produced gas led out from a reaction chamber to 300°C to 800°C. According to the above constitution, the cooling rate of the reaction produced gas is rendered proper to prevent a reverse reaction to tetrachlorosilane and byproduction of polymer. The cooled reaction produced gas is subjected to heat exchange with at least one of tetrachlorosilane and hydrogen introduced into a reaction chamber (2) for preheating.