| 发明名称 |
METHOD FOR HOUSING PELLICLE |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for housing a pellicle by which vibration can be suppressed even when the vibration is caused rocking during transportation while suppressing increase in the weight of the entire storage container after a pellicle is housed as much as possible. <P>SOLUTION: In the method for housing the pellicle 1 having a pellicle film 3 stretched over a pellicle frame body 2 in a pellicle storage container 6 composed of at least a tray 5 and a cap 4, the pellicle 1 is housed by holding and fixing through a movable pellicle holding part A that is detachably attached to a fixing type pellicle holding part B fixed to the tray 5 at least two positions. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
| 申请公布号 |
JP2008129453(A) |
申请公布日期 |
2008.06.05 |
| 申请号 |
JP20060316103 |
申请日期 |
2006.11.22 |
| 申请人 |
ASAHI KASEI ELECTRONICS CO LTD |
发明人 |
TAMURA ATSUSHI |
| 分类号 |
B65D85/86;G03F1/62;G03F1/66;H01L21/027;H01L21/673 |
主分类号 |
B65D85/86 |
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