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发明名称
Thin film deposition system and method
摘要
申请公布号
KR100835838(B1)
申请公布日期
2008.06.05
申请号
KR20020086912
申请日期
2002.12.30
申请人
发明人
分类号
H01L21/205
主分类号
H01L21/205
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代理人
主权项
地址
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